Minority carrier lifetime of thin polycrystalline silicon nanowire films on polycrystalline silicon layer prepared by aluminum-induced crystallization

Tatsuya Yamazaki; Shinya Kato; Shinsuke Miyajima; Makoto Konagai

doi:10.1117/12.2061663

7 October 2014 Minority carrier lifetime of thin polycrystalline silicon nanowire films on polycrystalline silicon layer prepared by aluminum-induced crystallization

Tatsuya Yamazaki, Shinya Kato, Shinsuke Miyajima, Makoto Konagai

Author Affiliations +

Proceedings Volume 9178, Next Generation Technologies for Solar Energy Conversion V; 91780L (2014) https://doi.org/10.1117/12.2061663
Event: SPIE Solar Energy + Technology, 2014, San Diego, California, United States

Abstract

We demonstrate the minority carrier lifetime measurements of polycrystalline silicon nanowires (poly-SiNW) films passivated with aluminum oxide (Al₂O₃) deposited by atomic layer deposition (ALD). The poly-SiNW films were prepared by metal-assisted chemical etching of poly-Si films. The poly-Si films were prepared by solid phase crystallization of a-Si films deposited by radio-frequency sputtering on aluminum induced crystallized poly-Si template. The deposition of an ALD-Al₂O₃ passivation layer and subsequent annealing enabled us to measure effective minority carrier lifetime of the poly-SiNW films. The effective lifetime was found to be 5.76 μs. This result indicates that ALDAl₂O₃ is beneficial to surface passivation of poly-SiNW films.

Citation Download Citation

Tatsuya Yamazaki, Shinya Kato, Shinsuke Miyajima, and Makoto Konagai "Minority carrier lifetime of thin polycrystalline silicon nanowire films on polycrystalline silicon layer prepared by aluminum-induced crystallization", Proc. SPIE 9178, Next Generation Technologies for Solar Energy Conversion V, 91780L (7 October 2014); https://doi.org/10.1117/12.2061663

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available