Half a century of light scatter metrology and counting

John C. Stover

doi:10.1117/12.2064044

5 September 2014 Half a century of light scatter metrology and counting

John C. Stover

Proceedings Volume 9186, Fifty Years of Optical Sciences at The University of Arizona; 91860V (2014) https://doi.org/10.1117/12.2064044
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Back in the early days Bill Wolf once said something like: “The guy with the lowest scatter measurement is closest to the right answer.” He was often right then – but not anymore. Everything has changed. Today measurements are limited by Rayleigh scatter from the air – not the instrument. We have both written and physical standards and everybody spells BRDF the same way. In the time it takes to give this talk, over 100,000 silicon wafers will be inspected around the world using a few thousand scatterometers – average price about one million dollars each. The way the world illuminates everything from homes to football fields is changing with the advent of high brightness LED’s and these lighting systems are designed using a combination of scatter metrology and analysis techniques – many of which were started at The Optical Sciences Center. This paper reviews two major highlights in half a century of scatter metrology progress.

Citation Download Citation

John C. Stover "Half a century of light scatter metrology and counting", Proc. SPIE 9186, Fifty Years of Optical Sciences at The University of Arizona, 91860V (5 September 2014); https://doi.org/10.1117/12.2064044

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