25 September 2014 Manufacturing of freeform mirror by milling and altering its optical characteristics by Ns-laser polishing and ALD coatings
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Abstract
In this study we tested ns-laser and an atomic layer deposition (ALD) for polishing and coating CNC-machined aluminum freeform mirrors that are used in a compact multipoint fiber optical probe. Two types of ALD coatings, aluminum oxide and silicon dioxide were tested. The surface roughness of mirrors was analyzed prior to and after nanosecond-laser polishing and coating them on a Beneq TFS 200 ALD device. The freeform aluminum mirrors with and without coatings were then measured with optical profiler. The results show that improvement in the surface roughness can be seen with ns-laser polished and ALD coated aluminum surfaces.
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Jarkko Mutanen, Jarno J. J. Kaakkunen, Hemmo Tuovinen, Jouni Hiltunen, Sini Kivi, Maunu Toiviainen, Juha Väyrynen, Janne Laukkanen, Victor Prokofiev, Pertti Pääkkönen, Mikko Juuti, Markku Kuittinen, Kari Mönkkönen, "Manufacturing of freeform mirror by milling and altering its optical characteristics by Ns-laser polishing and ALD coatings", Proc. SPIE 9192, Current Developments in Lens Design and Optical Engineering XV, 91921E (25 September 2014); doi: 10.1117/12.2061729; https://doi.org/10.1117/12.2061729
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