5 September 2014 A high performance room temperature THz sensor
Author Affiliations +
Resonant THz antenna-coupled micro-bolometers are considered as a potential candidates for room temperature THz imaging, as well as spectroscopic applications. Micromachining technology is found to be well-suitable to fabricate a micro-meter bolometer sensor suitable for MEMS implementation. The sensitivity of the sensor is determined to be up to 1000V/W and the noise equivalent power (NEP) – is down to 5pW /√Hz. The sensor parameters are designed to be easily implemented with a low cost standard preamplifier array which increases the pixel sensitivity to 106V/W without compromising the noise equivalent power.
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Janez Trontelj, Janez Trontelj, Gintaras Valušis, Gintaras Valušis, Rimvydas Venckevičius, Rimvydas Venckevičius, Irmantas Kašalynas, Irmantas Kašalynas, Aleksander Sešek, Aleksander Sešek, Andrej Švigelj, Andrej Švigelj, "A high performance room temperature THz sensor", Proc. SPIE 9199, Terahertz Emitters, Receivers, and Applications V, 91990K (5 September 2014); doi: 10.1117/12.2060692; https://doi.org/10.1117/12.2060692

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