A compact in-situ ellipsometer using the liquid crystal variable retarder

Wen-Tse Shih; Mei-Li Hsieh; Yu Faye Chao

doi:10.1117/12.2060567

5 September 2014 A compact in-situ ellipsometer using the liquid crystal variable retarder

Wen-Tse Shih, Mei-Li Hsieh, Yu Faye Chao

Proceedings Volume 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII; 920009 (2014) https://doi.org/10.1117/12.2060567
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

For monitoring the optical properties of material under a dynamical processing, we design a compact in-situ ellipsometry by using a liquid crystal (LC) phase retarder. Since the key issue of an accurate ellipsometer is the alignment of each optical component in the system, hence we not only proposed the alignment procedure, we also calibrated the phase retardation of LC retarder for this in-situ ellipsometry. The azimuths of polarizers and phase retarders can be aligned by the analytical solutions of the azimuthal deviations. The phase retardation can be directly determined by the intensity ratio technique.

Citation Download Citation

Wen-Tse Shih, Mei-Li Hsieh, and Yu Faye Chao "A compact in-situ ellipsometer using the liquid crystal variable retarder", Proc. SPIE 9200, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications VIII, 920009 (5 September 2014); https://doi.org/10.1117/12.2060567

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