Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy

Dirk Voigt; Arthur S. van de Nes; Steven A. van den Berg

doi:10.1117/12.2060537

18 August 2014 Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy

Dirk Voigt; Arthur S. van de Nes; Steven A. van den Berg

Author Affiliations +

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 920308 (2014) https://doi.org/10.1117/12.2060537
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Fabry-Perot displacement interferometry (FPI) offers high sensitivity and resolution with direct traceability to optical frequency standards. FPI can provide means for demanding calibration tasks in precision engineering and high-tech systems. We report on our investigation of the measurement methodology applied to highest precision capacitive displacement sensors. We use a dedicated metrological FPI instrumentation that provides an actuated reference target with a relatively large traceable displacement stroke. The envisaged sub-nanometer measurement uncertainty seems very challenging under practical ambient atmospheric conditions and with the necessary sensor mounting components. In anticipation of these limitations, we propose a new FPI instrumental configuration with a very short cavity and discuss expected benefits, most importantly the very low sensitivity to air refractive index variations and the versatility for practical calibration purposes. We aim again for sub-nanometer measurement uncertainty and report on the status of the experimental set-up for this short cavity FPI.

Citation Download Citation

Dirk Voigt, Dirk Voigt, Arthur S. van de Nes, Arthur S. van de Nes, Steven A. van den Berg, Steven A. van den Berg, } "Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920308 (18 August 2014); doi: 10.1117/12.2060537; https://doi.org/10.1117/12.2060537

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