Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy

Dirk Voigt; Arthur S. van de Nes; Steven A. van den Berg

doi:10.1117/12.2060537

18 August 2014 Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy

Dirk Voigt, Arthur S. van de Nes, Steven A. van den Berg

Author Affiliations +

Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 920308 (2014) https://doi.org/10.1117/12.2060537
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Fabry-Perot displacement interferometry (FPI) offers high sensitivity and resolution with direct traceability to optical frequency standards. FPI can provide means for demanding calibration tasks in precision engineering and high-tech systems. We report on our investigation of the measurement methodology applied to highest precision capacitive displacement sensors. We use a dedicated metrological FPI instrumentation that provides an actuated reference target with a relatively large traceable displacement stroke. The envisaged sub-nanometer measurement uncertainty seems very challenging under practical ambient atmospheric conditions and with the necessary sensor mounting components. In anticipation of these limitations, we propose a new FPI instrumental configuration with a very short cavity and discuss expected benefits, most importantly the very low sensitivity to air refractive index variations and the versatility for practical calibration purposes. We aim again for sub-nanometer measurement uncertainty and report on the status of the experimental set-up for this short cavity FPI.

Citation Download Citation

Dirk Voigt, Arthur S. van de Nes, and Steven A. van den Berg "Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920308 (18 August 2014); https://doi.org/10.1117/12.2060537

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE