18 August 2014 A trial for a reliable shape measurement using interferometry and deflectometry
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Abstract
Phase measuring deflectometry is an emerging technique to measure specular complex surface, such as aspherical surface and free-form surface. It is very attractive for its wide dynamic range of vertical scale and application range. Because it is a gradient based surface profilometry, we have to integrate the measured data to get surface shape. It can be cause of low accuracy. On the other hand, interferometry is accurate and well-known method for precision shape measurement. In interferometry, the original measured data is phase of interference signal, which directly shows the surface shape of the target. However interferometry is too precise to measure aspherical surface, free-form surface and usual surface in common industry. To assure the accuracy in ultra-precision measurement, reliability is the most important thing. Reliability can be kept by cross-checking. Then I will propose measuring method using both interferometer and deflectometry for reliable shape measurement. In this concept, global shape is measured using deflectometry and local shape around flat area is measured using interferometry. The result of deflectometry is global and precise. But it include ambiguity due to slope integration. In interferometry, only a small area can be measured, which is almost parallel to the reference surface. But it is accurate and reliable. To combine both results, it should be global, precise and reliable measurement. I will present the concept of combination of interferometry and deflectometry and some preliminary experimental results.
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Ryohei Hanayama, "A trial for a reliable shape measurement using interferometry and deflectometry", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030D (18 August 2014); doi: 10.1117/12.2060353; https://doi.org/10.1117/12.2060353
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