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18 August 2014Characterization of field dependent aberrations in Fizeau interferometer using double Zernike polynomials
Fizeau interferometer is widely used to test the surface deformation of the optical lens surface profile. However, in some
measurement circumstances the common path condition of the Fizeau configuration does not hold. For example, the subaperture
scanning interferometry of asphere or the non-null aspherical element testing has dense fringe spacing.
Systematic aberrations of non-null testing are introduced into the measurement wavefront with the high wavefront slope
of the returning beam. We propose to use a two-dimension scanning device to drive a test ball to different fields of the
Fizeau interferometer for the the interference phase at each field. By least square fitting the measurement, we can get the
double Zernike polynomial coefficients representing the field dependent aberrations in the interferometer system.
According to the coefficients, the off-axis aberrations in the interferometer can be identified
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Hung-Sheng Chang, Chao-Wen Liang, Po-Chih Lin, Ming-Sen Tsao,, "Characterization of field dependent aberrations in Fizeau interferometer using double Zernike polynomials," Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030I (18 August 2014); https://doi.org/10.1117/12.2061493