18 August 2014 Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer
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For the surface shape measurement of a semiconductor with a highly reflective index, it is important to effectively suppress the harmonic signals from multiple reflections. In application, the phase extraction algorithm should have a maximum value when there is no phase-shift miscalibration. In this presentation, a new 4N - 3 phase extraction algorithm, which has the ability to suppress harmonic signals and exhibits a fringe contrast maximum value when there is no phaseshift error, was derived. This new 4N - 3 algorithm consists of a new polynomial window function and a discrete Fourier transform term and has the ability to compensate for 2nd-order nonlinearity in the phase shift. The suppression ability of the new polynomial window function is compared with other conventional window functions. The sampling functions of the new 4N - 3 algorithm have much smaller amplitudes in the vicinity of the detection frequency than does synchronous detection or other phase extraction algorithms with conventional window functions.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yangjin Kim, Yangjin Kim, Kenichi Hibino, Kenichi Hibino, Naohiko Sugita, Naohiko Sugita, Mamoru Mitsuishi, Mamoru Mitsuishi, "Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030Q (18 August 2014); doi: 10.1117/12.2061476; https://doi.org/10.1117/12.2061476

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