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18 August 2014Interferometric microscope with true color imaging
Optical 3D profilers based on Coherence Scanning Interferometry (CSI) provide high-resolution non-contact metrology
for a broad range of applications. Capture of true color information together with 3D topography enables the detection of
defects, blemishes or discolorations that are not as easily identified in topography data alone. Uses for true color 3D
imaging include image segmentation, detection of dissimilar materials and edge enhancement. This paper discusses the
pros and cons of color capture using standard color detectors and presents an alternative solution that does not rely on
color filters at the camera, thus preserving the high lateral and vertical resolution of CSI instruments.
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J. L. Beverage, X. Colonna de Lega, M. F. Fay, "Interferometric microscope with true color imaging," Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030S (18 August 2014); https://doi.org/10.1117/12.2063264