Interferometric microscope with true color imaging

J. L. Beverage; X. Colonna de Lega; M. F. Fay

doi:10.1117/12.2063264

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18 August 2014 Interferometric microscope with true color imaging

J. L. Beverage, X. Colonna de Lega, M. F. Fay

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Proceedings Volume 9203, Interferometry XVII: Techniques and Analysis; 92030S (2014) https://doi.org/10.1117/12.2063264
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Optical 3D profilers based on Coherence Scanning Interferometry (CSI) provide high-resolution non-contact metrology for a broad range of applications. Capture of true color information together with 3D topography enables the detection of defects, blemishes or discolorations that are not as easily identified in topography data alone. Uses for true color 3D imaging include image segmentation, detection of dissimilar materials and edge enhancement. This paper discusses the pros and cons of color capture using standard color detectors and presents an alternative solution that does not rely on color filters at the camera, thus preserving the high lateral and vertical resolution of CSI instruments.

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J. L. Beverage, X. Colonna de Lega, and M. F. Fay "Interferometric microscope with true color imaging", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030S (18 August 2014); https://doi.org/10.1117/12.2063264

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