18 August 2014 Comparison of full-field interferometric measurement techniques applied to small vibration amplitudes determination
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Abstract
Classical time-averaging and stroboscopic interferometry are widely used for MEMS/MOEMS dynamic behavior investigations. Unfortunately both methods require an amplitude magnitude of at least 0.19λ to be able to detect resonant frequency of the object. Moreover the precision of measurement is limited. That puts strong constrains on the type of element to be tested. In this paper the comparison of two methods of microobject vibration measurements that overcome aforementioned problems are presented. Both methods maintain high speed measurement time and extend the range of amplitudes to be measured (below 0.19λ), moreover can be easily applied to MEMS/MOEMS dynamic parameters measurements.
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Adam Styk, "Comparison of full-field interferometric measurement techniques applied to small vibration amplitudes determination", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 92030V (18 August 2014); doi: 10.1117/12.2062137; https://doi.org/10.1117/12.2062137
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