18 August 2014 Analysis of optimization method for interferometric evaluation of small shape deviations
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Abstract
This work is focused on a description and an analysis of an optimization method for the evaluation of small deviations of optical surface shape in interferometric testing. The proposed method does not require a detailed analysis of the interference field as it is necessary with classical evaluation methods of interference patterns and it uses the optimization techniques for the determination of the deviation of the tested surface from its nominal shape. This method compares interferograms, which correspond to the nominal shape of optical surfaces, and interferograms of the tested optical surfaces using the suitable merit function based on variance of two interference patterns. It can be used for the comparison of two surface shapes.
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Jiří Novák, Pavel Novák, Antonin Mikš, "Analysis of optimization method for interferometric evaluation of small shape deviations", Proc. SPIE 9203, Interferometry XVII: Techniques and Analysis, 920312 (18 August 2014); doi: 10.1117/12.2061001; https://doi.org/10.1117/12.2061001
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