7 October 2014 Front Matter: Volume 9206
Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 9206 including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.

The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon.

Please use the following format to cite material from this book:

Author(s), “Title of Paper,” in Advances in Metrology for X-Ray and EUV Optics V, edited by Lahsen Assoufid, Haruhiko Ohashi, Anand Krishna Asundi, Proceedings of SPIE Vol. 9206 (SPIE, Bellingham, WA, 2014) Article CID Number.

ISSN: 0277-786X

ISBN: 9781628412338

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Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print and on CD-ROM. Papers are published as they are submitted and meet publication criteria. A unique, consistent, permanent citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:

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  • The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc.

The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. Numbers in the index correspond to the last two digits of the six-digit CID Number.

Authors

Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc.

Alatawi, Ayshah, 0E

Alcock, Simon G., 08

Anton, J., 0H

Artemiev, Nikolay A., 03, 0G, 0I

Assoufid, L., 0H

Berujon, Sebastien, 08

Bischoff, P., 07

Chow, Ken P., 0G

Domning, Edward E., 03, 0G

Eggenstein, F., 07, 0J

Endo, K., 02

Erko, A., 0J

Follath, R., 0J

Frolov, O., 0D

Gaupp, A., 07

Geckeler, Ralf D., 0F

Kearney, S., 0H

Kishimoto, H., 04

Kitayama, T., 02

Kolacek, K., 0D

Koyama, Takahisa, 05

Kudo, R., 02

Künstner, S., 0J

Lacey, Ian, 03, 0G, 0I

Li, Ming, 06

Liu, W., 0H

Mast, M., 0J

Matsuyama, Satoshi, 05

McKinney, Wayne R., 03, 0I

Melich, R., 0D

Miura, T., 04

Morrison, Gregory Y., 03

Morton, Simon A., 03

Nakano, M., 02

Ohashi, Haruhiko, 04, 05

Okita, K., 02

Okuda, K., 02

Padmore, Howard A., 0I

Prukner, V., 0D

Qian, J., 0H

Reardon, Patrick J., 0E

Sawhney, Kawal, 08

Schäfers, F., 07, 0J

Schmidt, J. S., 0J

Schmidt, J., 0D

Senba, Y., 04

Senf, F., 07, 0J

Shu, D., 0H

Siewert, Frank, 0F, 0J

Smith, Brian V., 03, 0G

Sokolov, A. A., 07, 0J

Straus, J., 0D

Sullivan, J., 0H

Sutter, John, 08

Tang, Shanzhi, 06

Tokuta, Y., 02

Wang, Hongchang, 08

Wang, Lichao, 06

Wang, Qiushi, 06

Yamamura, K., 02

Yamauchi, Kazuto, 05

Yandayan, Tanfer, 0F

Yang, Fugui, 06

Yashchuk, Valeriy V., 03, 0G, 0I

Yumoto, Hirokatsu, 05

Zeschke, T., 07, 0J

Conference Committee

  • Program Track Chair

    • Katherine Creath, Optineering (United States) and The Univ. of Arizona (United States)

  • Conference Chairs

    • Lahsen Assoufid, Argonne National Laboratory (United States)

    • Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (Japan)

    • Anand Krishna Asundi, Nanyang Technological University (Singapore)

  • Conference Program Committee

    • Simon G. Alcock, Diamond Light Source Ltd. (United Kingdom)

    • Raymond Barrett, European Synchrotron Radiation Facility (France)

    • Daniele Cocco, SLAC National Accelerator Laboratory (United States)

    • Leslie L. Deck, Zygo Corporation (United States)

    • Ralf D. Geckeler, Physikalisch-Technische Bundesanstalt (Germany)

    • Kenneth A. Goldberg, Lawrence Berkeley National Laboratory (United States)

    • Mikhail V. Gubarev, NASA Marshall Space Flight Center (United States)

    • Mourad Idir, Brookhaven National Laboratory (United States)

    • Weiguo Liu, Xi'an University of Technology (China)

    • Hidekazu Mimura, The University of Tokyo (Japan)

    • Josep Nicolas, CELLS - ALBA (Spain)

    • Rajdeep Singh Rawat, National Institute of Education (Singapore)

    • Mark D. Roper, Daresbury Laboratory (United Kingdom)

    • Kawal J. Sawhney, Diamond Light Source Ltd. (United Kingdom)

    • Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)

    • Regina Soufli, Lawrence Livermore National Laboratory (United States)

    • Peter Z. Takacs, Brookhaven National Laboratory (United States)

    • Muriel Thomasset, Synchrotron SOLEIL (France)

    • Amparo Vivo, European Synchrotron Radiation Facility (France)

    • Zhanshan Wang, Tongji University (China)

    • Kazuto Yamauchi, Osaka University (Japan)

    • Tanfer Yandayan, TUBITAK UME (Turkey)

    • Valeriy V. Yashchuk, Lawrence Berkeley National Laboratory (United States)

    • Brian W. Yates, Canadian Light Source Inc. (Canada)

  • Session Chairs

    • 1 Slope Profilers

      Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (Japan)

      Valeriy V. Yashchuk, Lawrence Berkeley National Laboratory (United States)

    • 2 At-wavelength Metrology

      Kawal J. Sawhney, Diamond Light Source Ltd. (United Kingdom)

    • 3 Microscopes/Figure Interferometers

      Haruhiko Ohashi, Japan Synchrotron Radiation Research Institute (Japan)

    • 4 Extreme Angle Measurements and Calibration

      Frank Siewert, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)

      Kawal Sawhney, Diamond Light Source Ltd. (United Kingdom)

    • 5 Facilities

      Lahsen Assoufid, Argonne National Laboratory (United States)

      Daniele Cocco, SLAC National Accelerator Laboratory (United States)

© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 9206", Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 920601 (7 October 2014); doi: 10.1117/12.2084726; https://doi.org/10.1117/12.2084726
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