In-situ stress study on WSi2/Si multilayers

Bing Shi; Albert T. Macrander; Jörg Maser; Raymond Conley; Lahsen Assoufid

doi:10.1117/12.2061869

5 September 2014 The effect of unequal bilayer thickness on stress in WSi₂/Si multilayers for multilayer Laue Lens structures

Bing Shi, Albert T. Macrander, Jörg Maser, Raymond Conley, Lahsen Assoufid

Author Affiliations +

Proceedings Volume 9207, Advances in X-Ray/EUV Optics and Components IX; 920708 (2014) https://doi.org/10.1117/12.2061869
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Stress in multilayer Laue lenses can be reduced by choosing unequal thicknesses for the two layers comprising a bilayer in the zone plate structure. We demonstrate this with the wafer curvature measured in-operando for sputter deposition of WSi2/Si bilayers. The curvature measurements showed that the compressive stress built in the multilayers during the deposition process bent the substrate wafers where these multilayers were coated onto it. Within equal thickness WSi2/Si bilayers, the Si layers contribute more compressive stress than the WSi₂ layers at a 4 mTorr Argon environment. Reducing the ratio of Si’s thickness in the WSi₂/Si bilayer decreased the total stress.

Citation Download Citation

Bing Shi, Albert T. Macrander, Jörg Maser, Raymond Conley, and Lahsen Assoufid "The effect of unequal bilayer thickness on stress in WSi₂/Si multilayers for multilayer Laue Lens structures", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920708 (5 September 2014); https://doi.org/10.1117/12.2061869

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available