5 September 2014 Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy
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Abstract
An achromatic and high-resolution hard X-ray microscope was developed, in which advanced Kirkpatrick-Baez mirror optics with four total-reflection mirrors was employed as an objective. A fine test pattern with a 100 nm feature size could successfully be resolved. Full-field imaging, in combination with X-ray absorption near edge structure (XANES) spectroscopy, was used to characterize tungsten particles. XANES spectra were obtained over the entire observation area, showing good agreement with the XANES spectrum of pure tungsten.
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S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi, "Development of achromatic full-field hard x-ray microscopy and its application to x-ray absorption near edge structure spectromicroscopy", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 92070Q (5 September 2014); doi: 10.1117/12.2060783; https://doi.org/10.1117/12.2060783
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