5 September 2014 Damage of EUV optical coatings induced by alpha-particles bombardment
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Abstract
Future solar missions will investigate the Sun from very close distances and optical components are constantly exposed to low energy ions irradiation. Single layer thin films as well as extreme ultraviolet multilayer coatings have been exposed to low energy alpha particles (4keV). In order to change the total dose accumulated, for each ion fluency the time of exposure was varied. The experiment was carried out considering typical doses accumulated during the ESA Solar Orbiter mission. Results show that ion implantation affects the performances of both single and multilayer coatings.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. G. Pelizzo, S. Zuccon, E. Napolitani, A. J. Corso, P. Zuppella, E. Tessarolo, M. Nardello, F. Gerlin, G. Naletto, S. Fineschi, E. Antonucci, "Damage of EUV optical coatings induced by alpha-particles bombardment", Proc. SPIE 9207, Advances in X-Ray/EUV Optics and Components IX, 920715 (5 September 2014); doi: 10.1117/12.2062553; https://doi.org/10.1117/12.2062553
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