3 October 2014 Development of a one-dimensional two-stage focusing system with two deformable mirrors
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Abstract
A one-dimensional two-stage focusing system using two deformable mirrors was constructed. To realize the precise elliptical shapes, the mirror deformations were finely adjusted using the pencil-beam scan, which is a method of wavefront measurement. X-rays of 10 keV energy were one-dimensionally focused to a full width at half maximum of 90 nm, which agrees well with the diffraction limit.
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T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi, "Development of a one-dimensional two-stage focusing system with two deformable mirrors", Proc. SPIE 9208, Adaptive X-Ray Optics III, 920802 (3 October 2014); doi: 10.1117/12.2061821; https://doi.org/10.1117/12.2061821
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