Design and fabrication of a high precision x-ray deformable mirror

Audrey Brooks; Allan Wirth; Eric Lintz; Jeffrey Cavaco

doi:10.1117/12.2062289

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3 October 2014 Design and fabrication of a high precision x-ray deformable mirror

Audrey Brooks, Allan Wirth, Eric Lintz, Jeffrey Cavaco

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Proceedings Volume 9208, Adaptive X-Ray Optics III; 92080E (2014) https://doi.org/10.1117/12.2062289
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

AOA-Xinetics has been developing techniques for shaping grazing incidence optics with surface-normal and surface-parallel electrostrictive Lead magnesium niobate (PMN) actuators bonded to mirror substrates for several years. These actuators are highly reliable; exhibit little to no hysteresis, aging or creep; and can be closely spaced to correct low and mid-spatial frequency errors in a compact package. In this paper we discuss the design and fabrication of a 45cm grazing incidence mirror fitted with 45 PMN actuators and integral strain gauges and temperature sensors that allow sub-nanometer control of the surface figure.

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Audrey Brooks, Allan Wirth, Eric Lintz, and Jeffrey Cavaco "Design and fabrication of a high precision x-ray deformable mirror", Proc. SPIE 9208, Adaptive X-Ray Optics III, 92080E (3 October 2014); https://doi.org/10.1117/12.2062289

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