A New Line Width Standard For Reflected Light Inspection

Robert Monteverde; Diana Nyyssonen

doi:10.1117/12.968388

1 January 1988 A New Line Width Standard For Reflected Light Inspection

Robert Monteverde, Diana Nyyssonen

Proceedings Volume 0921, Integrated Circuit Metrology, Inspection, and Process Control II; (1988) https://doi.org/10.1117/12.968388
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

A new Line Width Standard has been developed. It is a physical specimen consisting of calibrated lines and spaces patterned in metal and dielectric layers on a silicon substrate. The standard is for calibration of reflected light measurement systems. The Line Width Standard is designed such that the optical profile of the standard can be very nearly matched to the optical profile of the specimen the user wants to measure. The calibration of the Line Width Standard is based on first principles of physics and is therefore a primary standard. A special measurement system based on an optical scanning microscope developed at the National Bureau of Standards was built to calibrate the line and space dimensions.

Citation Download Citation

Robert Monteverde and Diana Nyyssonen "A New Line Width Standard For Reflected Light Inspection", Proc. SPIE 0921, Integrated Circuit Metrology, Inspection, and Process Control II, (1 January 1988); https://doi.org/10.1117/12.968388

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