Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments

Allyn Jackson

doi:10.1117/12.2066378

16 September 2014 Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments

Allyn Jackson

Author Affiliations +

Proceedings Volume 9235, Photomask Technology 2014; 92350E (2014) https://doi.org/10.1117/12.2066378
Event: SPIE Photomask Technology, 2014, Monterey, California, United States

Abstract

There are significant advantages of using the ReticleSense^TM Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles in reticle environments as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.

Citation Download Citation

Allyn Jackson "Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments", Proc. SPIE 9235, Photomask Technology 2014, 92350E (16 September 2014); https://doi.org/10.1117/12.2066378

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available