16 September 2014 Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments
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Abstract
There are significant advantages of using the ReticleSenseTM Airborne Particle Sensor (APSR) in reticle environments to locate and troubleshoot airborne particles in reticle environments as compared to traditional surface scan reticle, in-situ or hand-held methods. Time, resource and cost savings are identified.
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Allyn Jackson, "Increasing efficiency and effectiveness of processes related to airborne particles in reticle mask environments", Proc. SPIE 9235, Photomask Technology 2014, 92350E (16 September 2014); doi: 10.1117/12.2066378; https://doi.org/10.1117/12.2066378
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