16 September 2014 Shear force microscopy using piezoresistive cantilevers in surface metrology
Author Affiliations +
Proceedings Volume 9236, Scanning Microscopies 2014; 92360A (2014) https://doi.org/10.1117/12.2066247
Event: SPIE Scanning Microscopies, 2014, Monterey, California, United States
In this article we describe application of piezoresistive cantilevers in surface investigations carried out with the use of shear force microscopy (ShFM). The novel piezoresistive cantilevers integrate a Wheatstone piezoresistive bridge was used to detect the cantilever deflection, thermal deflection detector and planar tip protruding out of the spring beam. Because the planar tip deflection can be detected and controlled electronically the described technology is very flexible and can be applied in many surface investigations. In this article we will present operation theory of the described solution, experimental setup, methods for calibration of the tip deflection detection and actuation The analysis will be illustrated with example results of topography measurements performed using the described technology.
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Teodor Gotszalk, Teodor Gotszalk, Daniel Kopiec, Daniel Kopiec, Andrzej Sierakowski, Andrzej Sierakowski, Paweł Janus, Paweł Janus, Piotr Grabiec, Piotr Grabiec, Ivo W. Rangelow, Ivo W. Rangelow, "Shear force microscopy using piezoresistive cantilevers in surface metrology", Proc. SPIE 9236, Scanning Microscopies 2014, 92360A (16 September 2014); doi: 10.1117/12.2066247; https://doi.org/10.1117/12.2066247

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