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22 September 2014 Research of scratch visibility in (subsurface) damage detection based on total internal reflection microscopy
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Abstract
Damages on or near polished substates can be easily observed by TIRM(Total Internal Reflection Microscopy). In our experiments we found that there was a strong dependence of scratch visibility on the angle(φ) between scratches and normal direction of the incident plane. In this paper, the scattered field distribution of a scratch and the imaging properties of a microscope are analyzed. We believe that it is the anisotropy of illumination in TIR-illumination mode that causes the visibility changes of a scratch. After taking this directionality into consideration, we propose an experimental method for TIRM to take picutures with all scratches in all directions in one image.
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Hui Cui, Shijie Liu, Yuanan Zhao, Jie Liu, and Jun He "Research of scratch visibility in (subsurface) damage detection based on total internal reflection microscopy", Proc. SPIE 9238, Pacific Rim Laser Damage 2014: Optical Materials for High-Power Lasers, 92380H (22 September 2014); doi: 10.1117/12.2073535; https://doi.org/10.1117/12.2073535
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