3 February 2015 Tunable diode-laser spectroscopy (TDLS) of 811.5nm Ar line for Ar(4s[3/2]2) number density measurements in a 40MHz RF discharge
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Proceedings Volume 9255, XX International Symposium on High-Power Laser Systems and Applications 2014; 92552W (2015) https://doi.org/10.1117/12.2070837
Event: XX International Symposium on High Power Laser Systems and Applications, 2014, Chengdu, China
Abstract
A hardware and a computative technique for tunable laser spectroscopy was developed for simultaneous measurement of Gaussian and Lorentian components of line broadening by fitting Voigt line profile. The technique was tested in measurements of pressure broadening coefficient for 811.5 nm Ar absorption line in a 40 MHz discharge in the pressure range 15-75 Torr with the help of tunable diode laser with a short external resonator. The obtained values for this coefficients reduced to 300 K are: ξAr-Ar = (2.85±0.1)×10-10 s-1cm3 for broadening in the parent gas and ξAr-He = (3.3±0.1)×10-10 s-1cm3 for broadening in helium. A good agreement with published results is observed. Measured Ar(1s5) number density amounted to 10-11cm-3 for the discharge power density ~10 W cm-3.
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Pavel A. Mikheyev, Alexander K. Chernyshov, Nikolay I. Ufimtsev, Ekaterina A. Vorontsova, "Tunable diode-laser spectroscopy (TDLS) of 811.5nm Ar line for Ar(4s[3/2]2) number density measurements in a 40MHz RF discharge", Proc. SPIE 9255, XX International Symposium on High-Power Laser Systems and Applications 2014, 92552W (3 February 2015); doi: 10.1117/12.2070837; https://doi.org/10.1117/12.2070837
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