20 February 2015 Recent developments on surface acoustic wave (SAW) sensors for harsh conditions
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Proceedings Volume 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII; 92581I (2015) https://doi.org/10.1117/12.2071780
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies 2014, 2014, Constanta, Romania
Abstract
The results of research into Surface Acoustic Waves (SAW) devices have been recognized for their efficiency and versatility in the electrical signals processing. Actual progress in the industrial application of piezoelectric materials such as Lithium Niobate (LiNbO3), Langasite (LGS), Lanthanum-Gallium Silicate La3Ga5SiO14 and Gallium Orthophosphate (GaPO4), allows the manufacturing of devices with piezoelectric performances, which overcome the limits obtained with quartz crystals. The single crystal materials have a long term high stability - near to infinite – and moreover, some of these have an excellent behavior with temperature variation. Today, GaPO4 with its properties is by far the best suited piezoelectric material to be used in sensor applications for machine monitoring and pressure measurements, at high temperatures. SAW micro devices based on GaPO4 operate at temperatures of up to 8000C. For a particular case, of harsh-environment applications, additional challenges need to be overcome, relating to substrate integrity and operation, thin film electrode fabrication, device packaging, and sensor interrogation. This paper reviews the novel progres in the area of (SAW) sensors for harsh conditions.
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Paul Schiopu, Irinela Chilibon, Neculai Grosu, Alexandru Craciun, "Recent developments on surface acoustic wave (SAW) sensors for harsh conditions ", Proc. SPIE 9258, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 92581I (20 February 2015); doi: 10.1117/12.2071780; https://doi.org/10.1117/12.2071780
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