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24 October 2014 Polymer waveguide based hybrid opto-electric integration technology
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While monolithic integration especially based on InP appears to be quite an expensive solution for optical devices, hybrid integration solutions using cheaper material platforms are considered powerful competitors because of the high freedom of design, yield optimization and relative cost-efficiency. Among them, the polymer planar-lightwave circuit (PLC) technology is regarded attractive as polymer offers the potential of fairly simple and low-cost fabrication, and of low-cost packaging. In our work, polymer PLC was fabricated by using the standard reactive ion etching (RIE) technique, while other active and passive devices can be integrated on the polymer PLC platform. Exemplary polymer waveguide devices was a 13-channel arrayed waveguide grating (AWG) chip, where the central channel cross-talk was below -30dB and the polarization dependent frequency shift was mitigated by inserting a half wave plate. An optical 900 hybrid was also realized with one 2×4 multi-mode interferometer (MMI). The excess insertion losses are below 4dB for the C-band, while the transmission imbalance is below 1.2dB. When such an optical hybrid was integrated vertically with mesa-type photodiodes, the responsivity of the individual PD was around 0.06 A/W, while the 3 dB bandwidth reaches 24 ~ 27 GHz, which is sufficient for 100Gbit/s receivers. Another example of the hybrid integration was to couple the polymer waveguides to fiber by applying fiber grooves, whose typical loss value was 0.2 dB per-facet over a broad spectral range from 1200-1600 nm.
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Jinbin Mao, Lingling Deng, Xiyan Jiang, Rong Ren, Yumeng Zhai, and Jin Wang "Polymer waveguide based hybrid opto-electric integration technology", Proc. SPIE 9270, Optoelectronic Devices and Integration V, 92701I (24 October 2014);


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