11 November 2014 Digital holographic Michelson interferometer for nanometrology
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Abstract
The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.
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Alexander A. Sevrygin, Alexander A. Sevrygin, V. I. Korotkov, V. I. Korotkov, S. A. Pulkin, S. A. Pulkin, I. M. Tursunov, I. M. Tursunov, D. V. Venediktov, D. V. Venediktov, V. Yu. Venediktov, V. Yu. Venediktov, O. V. Volkov, O. V. Volkov, } "Digital holographic Michelson interferometer for nanometrology", Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 927118 (11 November 2014); doi: 10.1117/12.2071084; https://doi.org/10.1117/12.2071084
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