Freeform metrology based on phase retrieval and computer-generated hologram

Fa Zeng; Qiaofeng Tan; Yi Liu; Huarong Gu; Zhehai Zhou; Guofan Jin

doi:10.1117/12.2073227

5 November 2014 Freeform metrology based on phase retrieval and computer-generated hologram

Fa Zeng, Qiaofeng Tan, Yi Liu, Huarong Gu, Zhehai Zhou, Guofan Jin

Author Affiliations +

Proceedings Volume 9272, Optical Design and Testing VI; 92720E (2014) https://doi.org/10.1117/12.2073227
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Recently, interferometric null-testing with computer-generated hologram has been proposed as a non-contact and high precision solution to the freeform optics metrology. However, the interferometry solution owns some typical disadvantages such as the strong sensitivity to the table vibrations or temperature fluctuations, which hinders its usage outside the strictly controlled laboratory conditions. Phase retrieval presents a viable alternative to interferometry for measuring wavefront and can provide a more compact, less expensive, and more stable experimental setup. In this work, we propose a novel solution to freeform metrology based on phase retrieval and computer-generated hologram (CGH). The CGH is designed according to the ray tracing method, so as to compensate the aspheric aberration related to the freeform element. With careful alignment of the CGH and the freeform element in the testing system, several defocused intensity images can be captured for phase retrieval. In this paper the experimental results related to a freeform surface with 18×18mm² rectangular aperture (its peak-to-valley aspherity equals to 193um) are reported, meanwhile, we also have compared them with the measurement results given by the interferometry solution, so as to evaluate the validity of our solution.

Citation Download Citation

Fa Zeng, Qiaofeng Tan, Yi Liu, Huarong Gu, Zhehai Zhou, and Guofan Jin "Freeform metrology based on phase retrieval and computer-generated hologram", Proc. SPIE 9272, Optical Design and Testing VI, 92720E (5 November 2014); https://doi.org/10.1117/12.2073227

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Computer generated holography

Phase retrieval

Metrology

Interferometry

Wavefronts

Calibration

Chemical elements

Show All Keywords

Keywords/Phrases

Search In:

Publication Years