5 November 2014 Optical metrology techniques and apparatus for lens assembly
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Abstract
This paper presents the optical and lens design for alignment to meet the challenging position specifications. Fabrication of the prototypes and testing results and analysis are also presented. The system components as well as their interaction with each other were simulated with Zemax software and tested in an experimental setup in order to conduct tolerance study and provide specifications for the mechanical fixtures used in the system. The epoxy is used to affix the parts together in a cost effective manner for prototyping. The position accuracy of ±3 μm compared to the golden unit has been achieved.
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Shuping Wang, Shuping Wang, Chi Zhang, Chi Zhang, Colleen Davis, Colleen Davis, Mark Alt, Mark Alt, Zheng Ji, Zheng Ji, Yue Han, Yue Han, Michael Gardner, Michael Gardner, } "Optical metrology techniques and apparatus for lens assembly", Proc. SPIE 9272, Optical Design and Testing VI, 92720O (5 November 2014); doi: 10.1117/12.2069606; https://doi.org/10.1117/12.2069606
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