11 November 2014 A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing
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Abstract
Porous silicon material and device has attracted more attention for use as biochemical optical sensors. In this paper, A novel porous silicon-based multilayer dielectric-grating structures by adding high-reflectivity porous silicon stacks between the substrate and grating was fabricated, and the porous silicon grating height was set to be about 200 nm, the grating period was 4 μm, the air filling factor was 50%. A new better method of preparing this porous silicon-based multilayer dielectric-grating structures have also been employed.
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Jiaqing Mo, Jiaqing Mo, Yajun Liu, Yajun Liu, Changwu Lv, Changwu Lv, Xiaoyi Lv, Xiaoyi Lv, Zhenhong Jia, Zhenhong Jia, } "A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing", Proc. SPIE 9274, Advanced Sensor Systems and Applications VI, 927419 (11 November 2014); doi: 10.1117/12.2071350; https://doi.org/10.1117/12.2071350
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