13 November 2014 A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation
Author Affiliations +
Abstract
Silicon and porous silicon based photonic crystals are key aspects of photonic circuits with good compatibility with integrated circuits. Here a brief review is carried out on the fabrication of mid infrared photonic crystals using experimental processes of combining ion beam irradiation and electrochemical anodisation of silicon. Experimental processes have been developed to fabricate high aspect ratio trenches in porous silicon, high aspect ratio silicon pillars, buried channels in porous silicon, and multilevel freestanding silicon wires. These structures have the potential to be used for photonic crystals. Several 2D, quasi-3D and 3D mid infrared photonic crystals in porous silicon and silicon have been designed and fabricated.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhiya Dang, Mark Breese, Dongqing Liu, Shuvan Prashant Turaga, Sara Azimi, Jiao Song, Agnieszka Banas, Gonzalo Recio-Sánchez, "A review: mid-infrared photonic crystals in silicon and porous silicon based on ion beam irradiation", Proc. SPIE 9277, Nanophotonics and Micro/Nano Optics II, 92771Q (13 November 2014); doi: 10.1117/12.2072443; https://doi.org/10.1117/12.2072443
PROCEEDINGS
11 PAGES


SHARE
Back to Top