6 August 2014 Study on optical polishing experiment of zerodur mirror
Author Affiliations +
Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810D (2014) https://doi.org/10.1117/12.2068813
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
A zerodur mirror whose aperture is 900mm is chosen to be the primary mirror of an optical system. The mirror is polished by rapid polishing and precision polishing methods relatively. The final surface figures of the mirror are as follows: the peak-to-valley value (P-V value) is 0.204λ (λ=632.8nm), and the root-mean-square value (RMS value) is 0.016λ, which meet the requirement of the optical system. The results show that the polishing process is feasible.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huijun Wang, Huijun Wang, Hang Li, Hang Li, Peng Wang, Peng Wang, Wen Guo, Wen Guo, Yonggang Wang, Yonggang Wang, Yan Du, Yan Du, Huiwen Dong, Huiwen Dong, "Study on optical polishing experiment of zerodur mirror", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810D (6 August 2014); doi: 10.1117/12.2068813; https://doi.org/10.1117/12.2068813
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

Research on subsurface damage of glass-ceramics mirror
Proceedings of SPIE (October 27 2016)
NTSIC(New Technology SiC): the progress of recent two years
Proceedings of SPIE (November 20 2017)
Rapid fabrication of lightweight silicon-carbide mirrors
Proceedings of SPIE (September 08 2002)
Metal Optics Versus Glass Optics
Proceedings of SPIE (September 24 1979)
Fabrication and testing of large flats
Proceedings of SPIE (September 13 2007)

Back to Top