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6 August 2014 Study on optical polishing experiment of zerodur mirror
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Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810D (2014) https://doi.org/10.1117/12.2068813
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
A zerodur mirror whose aperture is 900mm is chosen to be the primary mirror of an optical system. The mirror is polished by rapid polishing and precision polishing methods relatively. The final surface figures of the mirror are as follows: the peak-to-valley value (P-V value) is 0.204λ (λ=632.8nm), and the root-mean-square value (RMS value) is 0.016λ, which meet the requirement of the optical system. The results show that the polishing process is feasible.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huijun Wang, Hang Li, Peng Wang, Wen Guo, Yonggang Wang, Yan Du, and Huiwen Dong "Study on optical polishing experiment of zerodur mirror", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810D (6 August 2014); https://doi.org/10.1117/12.2068813
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