6 August 2014 The real-time monitoring surface figure of optical elements in continuous polishing
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Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810L (2014) https://doi.org/10.1117/12.2069754
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
Continuous ring polishing is the key process in large aperture optical elements. The surface figure of polishing pad is inferred by the offline testing surface figure of workpiece. The defects, low processing efficiency and uncertainty processing time in traditional continuous polishing, the real-time monitoring method of polishing is proposed. The realtime monitoring system is set up based on the computer, the dynamic interferometer, a beam expanding system and a beam reflecting system. There are a workpiece and a glass monitoring plate placing in same ring. The surface figure of workpiece, monitored by the monitoring plate, synchronize with the surface of glass monitoring plate in Peak-Valley (PV) and POWER. The new method with simple structure is fast measuring and judgmental directly to the changes of surface figures. The results of real-time monitoring and surface figure converging on the workpiece are valid for continuous polishing through experimental validation.
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Jun Chen, Xueke Xu, Chaoyang Wei, Jianxun Gu, Aihuan Dun, Jianda Shao, "The real-time monitoring surface figure of optical elements in continuous polishing", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810L (6 August 2014); doi: 10.1117/12.2069754; https://doi.org/10.1117/12.2069754
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