In the paper, The problem about stability in low speed of the air bearing stage driven by a linear motor was investigated to satisfy the ultra-precision fly-cutting of KDP crystals. First of all, the modal of the servo system with the permanent magnet synchronous linear motor was analyzed. In the system of the low speed linear motor driver, the main interferences came from cutting force f Load , the friction of chain and cable f n , the ripple thrust f ripp , and motor friction f fric . Secondly, the factors about low speed stability were analyzed: the key to improve the system’s stability is to control the interference forces; Another important issue is to develop an advanced control strategy. Thirdly, some optimization experiments about low speed stability were developed as follows: the influence of feedback element, the influence of Power converter, speed optimization of damping feed-forward control, speed optimization of Spindle vibration, speed optimization based on disturbance observer. Finally the experimental results: the lowest speed of the stage can reach 0.2 mm/min; the error of the speed is less than 0.06mm/min when running between 1mm/min and 10 mm/min. The cutting experiment of KDP with the size of 330mm × 330mm × 10mm, was proceeded on the Fly-cutting machine by the feeding velocity of 1mm/min. The results about the surface roughness show that the value of Rq is 3.3nm and the value of Ra is 2.6nm.