Influences of grinding and polishing parameters on the quality of super smooth surface

Yuzhu Jin; Yi Tong; Lingyan Jiao; Dongxu Wu; Weijin Guo

doi:10.1117/12.2067769

6 August 2014 Influences of grinding and polishing parameters on the quality of super smooth surface

Yuzhu Jin, Yi Tong, Lingyan Jiao, Dongxu Wu, Weijin Guo

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810R (2014) https://doi.org/10.1117/12.2067769
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Firstly, in this paper, a reasonable process flow is designed and the surface roughness of each procedure is tested. Secondly, the influences of particle size distribution of slurry on the quality of super smooth surface are studied, and then the conclusions are obtained that large span distribution of slurry will lead to surface scratches. Lastly, the effects of aging and ratios of polishing pad on the quality of super smooth surface are researched, and then some specific process parameters are gained such as shaving cycle and asphalt ratios in different environments.

Citation Download Citation

Yuzhu Jin, Yi Tong, Lingyan Jiao, Dongxu Wu, and Weijin Guo "Influences of grinding and polishing parameters on the quality of super smooth surface", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810R (6 August 2014); https://doi.org/10.1117/12.2067769

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