Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Chunjin Wang; Xu Yang; Bo Zhong; Zhenzhong Wang; Yinbiao Guo; Qiao Xu

doi:10.1117/12.2067758

20 August 2014 Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Chunjin Wang, Xu Yang, Bo Zhong, Zhenzhong Wang, Yinbiao Guo, Qiao Xu

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92810U (2014) https://doi.org/10.1117/12.2067758
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It’s observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.

Citation Download Citation

Chunjin Wang, Xu Yang, Bo Zhong, Zhenzhong Wang, Yinbiao Guo, and Qiao Xu "Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92810U (20 August 2014); https://doi.org/10.1117/12.2067758

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