Research on ultrasonic cleaning technology of optical components

Lingyan Jiao; Yi Tong; Ying Cui; Jianhua Chen; Qingguang Bai

doi:10.1117/12.2067895

6 August 2014 Research on ultrasonic cleaning technology of optical components

Lingyan Jiao, Yi Tong, Ying Cui, Jianhua Chen, Qingguang Bai

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 928112 (2014) https://doi.org/10.1117/12.2067895
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Along with the higher demand of super smooth optical surface, the cleaning technique that is the critical process to obtain super smooth surface has to meet even higher standards. In virtue of higher efficiency and better effect, the ultrasonic cleaning technology has been widely used in cleaning high-end optical lenses. This paper introduced the process, principle and method of the ultrasonic cleaning technology for a super smooth surface. The basis of determining the main technical parameters, such as the power and frequency of ultrasonic wave, the ultrasonic time, the components of cleaning agent and its operating temperature, were also discussed. In addition, the progress situations of ultrasonic cleaning technologies including the characteristics of complex frequency ultrasonic and megasonics cleaning technology and the removal mechanism of different granularity of dirt were analyzed. The mechanism of complex frequency ultrasound produces chemical process and the relationship between megasonics boundary layer and the particles removing were studied. Results showed that the chemical functions of complex frequency ultrasound and megasonics were better than that of single frequency ultrasound for the particles removal effect. Therefore, the new complex frequency ultrasonic and megasonic cleaning technologies are very necessary for cleaning optical components.

Citation Download Citation

Lingyan Jiao, Yi Tong, Ying Cui, Jianhua Chen, and Qingguang Bai "Research on ultrasonic cleaning technology of optical components", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 928112 (6 August 2014); https://doi.org/10.1117/12.2067895

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KEYWORDS

Ultrasonics

Particles

Cavitation

Optical components

Liquids

Acoustics

Ultrasonography

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