Calibration technology research of force sensor in the manufacture of large optics

Si Li; Hongshen Zhao; Xiaojin Li; Wei Gu

doi:10.1117/12.2070941

6 August 2014 Calibration technology research of force sensor in the manufacture of large optics

Si Li, Hongshen Zhao, Xiaojin Li, Wei Gu

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92811F (2014) https://doi.org/10.1117/12.2070941
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Active lap technology is usually used in the manufacture of large optics. As the feedback element, force sensor plays an important role in the lap control system. With regard to the condition that the calibration of pulling force sensor is completed manually and inefficiently then the process of calibration data is complicated, a new automatic calibration technology of force sensor is developed. In which the method of data acquisition, computer control, curve fitting and error analysis are integrated in the calibration process, so the efficiency and reliability of force calibration is improved observably. The result of calibration can satisfy the requirement of the control system of active lap.

Citation Download Citation

Si Li, Hongshen Zhao, Xiaojin Li, and Wei Gu "Calibration technology research of force sensor in the manufacture of large optics", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92811F (6 August 2014); https://doi.org/10.1117/12.2070941

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