Abstract
According to the expression of the phase delay and diffraction efficiency of the diffractive optical elements(DOEs), the expression of diffraction efficiency of refraction and diffractive optical element with the tilt and decenter error in fabrication process was presented in this paper. Analysis results show, in the wavelength band of 501nm-554nm, the cycle of 500μm, the center wavelength of 521nm, when the tilt angleα increases form 0° to9.8° , the diffraction efficiency is above 99%; when the tilt angleα increases form 9.8° to 29.7° , diffraction efficiency is above 92.5%; when the tilt angleα is above 29.7° , the diffraction efficiency declines rapidly, diffraction efficiency is 0 when the tilt angleα is above 58° . When the decenter Δ increases form 0nm to 21.6μm,the diffraction efficiency is above 98%; when the decenter Δ increases form 21.6nm to 63.3μm, the diffraction efficiency is above 90%; when the decenter Δ is above 63.3μm, the diffraction efficiency declines rapidly, diffraction efficiency is 0 when the he decenter Δ is above 241.7μm. To sum up the results of analysis,mathematical analysis model of the relationship between the decenter and tilt error of diffractive optical element in processing and the diffraction efficiency can be used to guide the design of the refraction and diffractive hybrid optical system comprising the diffractive optical element.
