In the non-rotational symmetrical microstrcture surfaces generation using turning method with Fast Tool Servo(FTS), non-uniform distribution of the interpolation data points will lead to long processing cycle and poor surface quality. To improve this situation, nearly arc-length tool path generation algorithm is proposed, which generates tool tip trajectory points in nearly arc-length instead of the traditional interpolation rule of equal angle and adds tool radius compensation. All the interpolation points are equidistant in radial distribution because of the constant feeding speed in X slider, the high frequency tool radius compensation components are in both X direction and Z direction, which makes X slider difficult to follow the input orders due to its large mass. Newton iterative method is used to calculate the neighboring contour tangent point coordinate value with the interpolation point X position as initial value, in this way, the new Z coordinate value is gotten, and the high frequency motion components in X direction is decomposed into Z direction. Taking a typical microstructure with 4μm PV value for test, which is mixed with two 70μm wave length sine-waves, the max profile error at the angle of fifteen is less than 0.01μm turning by a diamond tool with big radius of 80μm. The sinusoidal grid is machined on a ultra-precision lathe succesfully, the wavelength is 70.2278μm the Ra value is 22.81nm evaluated by data points generated by filtering out the first five harmonics.