Through the method of nonlinear optical frequency conversion method, 532nm, 355nm and 266nm laser wavelength can be attained by YAG1064nm laser. Mirror that works in this system must satisfy the requirements of high reflection in four bands. Based on the film design system to choose appropriate coating materials, adopting electron beam vacuum ion assisted deposition technique, through optimizing the parameters of the process, the film that reflectance is 99.8% at 1064nm , 99.6% at 532nm ,97.9% at 355nm and 96.8% at 266nm is prepared on the substrate of JGS1. Additionally, the laser induce damage threshold in the ultraviolet wave band is 1.432J/cm2 at 355nm , 0.923J/cm2 at 266nm. The results show that all the preparation of mirror meets the requirements well.