Based on the principle of fluid mechanics, this paper presents the technological process of Fluid Jet Polishing. According
to the Preston hypothesis, the Fluid Jet Polishing removal amount could be described as a linearity function. The material
is removed by the collision and shear action between slurry and work-piece. Comparing to other optical method, kind of
abrasive slurry, average diameter of abrasive particle, pressure of abrasive particle, working time, incidence distance and
angle of incidence influence the surface figure result and quality of fluid jet polishing. The paper mainly focuses on the
influence of abrasive slurry and incidence distance.
In the experiment, we take the diameter of Φ120mm, thickness of 20mm, fused silica for example to examine the
exactitude principle of the fluid jet polishing. After the final process of fluid jet polishing, the surface figure PV(Peak
and Valley) is about 0.046λ(λ=633nm), the RMS (Root-Mean-Square)is about 0.007λ. The result of experiment testifies
fluid jet polishing could get high precision.