Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method

Qi Li; Shi Li; Yushu Shi; Wei Li; Sitian Gao

doi:10.1117/12.2068715

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18 September 2014 Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method

Qi Li, Shi Li, Yushu Shi, Wei Li, Sitian Gao

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Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92820P (2014) https://doi.org/10.1117/12.2068715
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The nonlinearity of the interferometer is an essential error in nanoscale measurements influenced by anisotropic gain and nonorthogonality of imperfect polarization components. In this paper, polarization error and the corresponding nonlinearity correction method are studied. The paper is divided into two parts, in the first part, main research focuses on the polarization mixing effect of multi-pass interferometer, besides this, polarization beam splitter and retardation plate are also analyzed, then a final synthetic evaluation is obtained through Jones matrix. In the second part, a harmonic separation method of interferometer signals is researched, the method first decomposes signals into Fourier series, then uses least square fitting to estimate coefficients of main terms of series. In the correction process, the primary phase angle is obtained through coefficients of base series and trigonometric formulas; the finer phase angle is obtained through coefficients of harmonics and Taylor expansion. Experimental results demonstrate that the nonlinearity of homodyne interferometer is significantly reduced in nanometer measurements.

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Qi Li, Shi Li, Yushu Shi, Wei Li, and Sitian Gao "Nonlinearity analysis in homodyne multi-pass interferometer with Jones matrix and correction with Fourier harmonic components method", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820P (18 September 2014); https://doi.org/10.1117/12.2068715

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