18 September 2014 Absolute flatness testing of large synchrotron optics
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Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92820R (2014) https://doi.org/10.1117/12.2068000
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China
Abstract
Interferometry is one of the most efficient techniques in surface figure testing while the transmission surface usually limits the accuracy. Besides, standard figure interferometers often have a typical aperture of about 150 mm diameter which can not satisfy the need of large optics calibration. A novel method for characterizing the absolute surface figure of long grazing-incidence optics used in synchrotron radiation beamlines is presented. We demonstrate oblique incidence interferometry to overcome the aperture limitation. Furthermore, multiple rotating measurements are used to remove the transmission surface errors. The new solution is simple and easy without dismantling the transmission flat throughout the calibration procedure. The theoretical derivation, experiment results and uncertainty analysis are presented.
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Weihao Lin, Weihao Lin, Yumei He, Yumei He, Li Song, Li Song, Hongxin Luo, Hongxin Luo, Jie Wang, Jie Wang, } "Absolute flatness testing of large synchrotron optics", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820R (18 September 2014); doi: 10.1117/12.2068000; https://doi.org/10.1117/12.2068000
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