The optical surface defect inspection by fringe reflection

Wenchuan Zhao; Lulu Li

doi:10.1117/12.2071177

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18 September 2014 The optical surface defect inspection by fringe reflection

Wenchuan Zhao; Lulu Li

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Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 928210 (2014) https://doi.org/10.1117/12.2071177
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

A method for the optical surface defects inspection based on fringe reflection is studied. The test system is composed of the fringe screen (a liquid crystal display, LCD), CCD camera and a computer. The intensity-modulated patterns are generated on the screens on both the horizontal and vertical directions respectively. The CCD records the pattern images via the tested surface. The phase and amplitude modulation are calculated by the phase-shifting technique. The defects location can be got from the amplitude modulation. Also the height of the defects can be gained by integration from the phase change caused by the defects. This method is simple and cheap. Compared with other techniques, this technique can get the three dimension information of the defects. The experimental results have confirmed the feasibility of this method.

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Wenchuan Zhao and Lulu Li "The optical surface defect inspection by fringe reflection", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928210 (18 September 2014); https://doi.org/10.1117/12.2071177

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