Simultaneous phase-shifting interferometry study based on the common-path Fizeau interferometer

Feng-wei Liu; Yong-qian Wu

doi:10.1117/12.2070972

18 September 2014 Simultaneous phase-shifting interferometry study based on the common-path Fizeau interferometer

Feng-wei Liu, Yong-qian Wu

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92821Z (2014) https://doi.org/10.1117/12.2070972
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

A simultaneous phase-shifting interferometry(SPSI) based on the common-path Fizeau interferometer has been discussed.In this system,two orthogonal polarized beams, using as the reference beam and test beam ,are detached by a particular Wollaston prism at a very small angle,then four equal sub-beams are achieved by a combination of three non-polarizing beam splitters(NPBS),and the phase shifts are introduced by four polarizers whose polarization azimuths are 0°, 45°, 90°, 135° with the horizontal direction respectively,the four phase shift interferograms are collected simultaneously by controlling the CCDs working at the same time .The SPSI principle is studied at first,then is the error analysis, finally we emulate the process of surface recovery by four steps phase shifts algorithm,the results indicate that, to ensure the feasibility of the SPSI system, we have to control the polarization azimuth error of the polarizer in ± 0.5°.

Citation Download Citation

Feng-wei Liu and Yong-qian Wu "Simultaneous phase-shifting interferometry study based on the common-path Fizeau interferometer", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92821Z (18 September 2014); https://doi.org/10.1117/12.2070972

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