High accurate subaperture testing

Fengtao Yan; Bin Fan; Xi Hou; Fan Wu; Baiping Lei

doi:10.1117/12.2068161

18 September 2014 High accurate subaperture testing

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, Baiping Lei

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92822H (2014) https://doi.org/10.1117/12.2068161
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are ~0.80nm and ~0.87nm.

Citation Download Citation

Fengtao Yan, Bin Fan, Xi Hou, Fan Wu, and Baiping Lei "High accurate subaperture testing", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92822H (18 September 2014); https://doi.org/10.1117/12.2068161

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