In the processing technology of optical microstructure, mechanical processing with high efficiency and quality is still
dominating. However, with microstructure surface quality higher and higher, the precision and ultra precision cutting
technology has been difficult to meet the needs of reality, and it still remains a big issue in production efficiency and
cost. In this case, the elliptical vibration cutting method is created. At present, research on the effect of elliptical
vibration cutting on surface quality of microstructures with special optical properties such as V-groove, micro pyramid
and sinusoidal grid surface is rarely seen. This paper focuses on the elliptical vibration cutting process of arc groove and
V-groove, aiming at finding the discipline of various parameters (frequency, amplitude, feed rate) and analyzing the
surface quality through experiments. Firstly, the principle of elliptical vibration cutting is introduced, the cutting
mechanism and the theoretical error are analyzed, and a vibration cutting system is designed for precision machining.
Because the surface quality and burr play have a huge impact on optical microstructure, effects of the vibration
frequency (0-2kHz), amplitude (0.5-2.5μm) as well as feed rate (6-30mm/min) on surface quality and burr suppression
are analyzed. The experimental results show that compared to normal cutting, elliptical vibration cutting has obvious
advantages. With the increases of the frequency and amplitude, the surface quality improves significantly, the surface
roughness is changed from 61.5nm to 25.3nm, and burr has been suppressed to some extent.