21 August 2014 A method for compensating the polarization aberration of projection optics in immersion lithography
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Abstract
As the numerical aperture (NA) of 193nm immersion lithography projection optics (PO) increasing, polarization aberration (PA) leads to image quality degradation seriously. PA induced by large incident angle of light, film coatings and intrinsic birefringence of lens materials cannot be ignored. An effective method for PA compensation is to adjust lens position in PO. However, this method is complicated. Therefore, in this paper, an easy and feasible PA compensation method is proposed: for ArF lithographic PO with hyper NA (NA=1.2), which is designed by our laboratory, the PA-induced critical dimension error (CDE) can be effectively reduced by optimizing illumination source partial coherent factor σout. In addition, the basic idea of our method to suppress pattern placement error (PE) is to adopt anti-reflection (AR) multi-layers MgF2/LaF3/MgF2 and calcium fluoride CaF2 of [111] crystal axes. Our simulation results reveal that the proposed method can effectively and quantificationally compensate large PA in the optics. In particular, our method suppresses the dynamic range of CDE from -12.7nm ~ +4.3nm to -1.1nm ~ +1.2nm, while keeping PE at an acceptable level.
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Yue Jia, Yue Jia, Yanqiu Li, Yanqiu Li, Lihui Liu, Lihui Liu, Chunying Han, Chunying Han, Xiaolin Liu, Xiaolin Liu, } "A method for compensating the polarization aberration of projection optics in immersion lithography", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928309 (21 August 2014); doi: 10.1117/12.2069711; https://doi.org/10.1117/12.2069711
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