Double drive modes unimorph deformable mirror for femtosecond laser beam wavefront correction

Ying Liu; Junjie Chen; Jianqiang Ma; Baoqing Li; Jiaru Chu

doi:10.1117/12.2070595

21 August 2014 Double drive modes unimorph deformable mirror for femtosecond laser beam wavefront correction

Ying Liu, Junjie Chen, Jianqiang Ma, Baoqing Li, Jiaru Chu

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 928311 (2014) https://doi.org/10.1117/12.2070595
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Once a laser beam suffers from wavefront aberrations, the intensity of the focal spot degrades and the shape of the focus spot distorts. The same problem also exists in femtosecond laser fabrication system. The aberrations in the femtosecond laser fabrication system contain two main components: system aberrations and aberrations from the refractive index mismatch problem. Recently, adaptive optics (AO) has been used for laser beam aberrations correction to improve the light beam quality. In this paper, we introduce an adaptive optics system with double drive modes unimorph deformable mirror (DM) into the femtosecond laser fabrication system. In the experiments, the hill-climbing algorithm based on Zernike modes is used to control the DM to correct the aberrations in the close-loop manner. After correction for system aberrations and the refractive index mismatch aberrations, the shape and maximum intensity of the focal laser spot is much improved.

Citation Download Citation

Ying Liu, Junjie Chen, Jianqiang Ma, Baoqing Li, and Jiaru Chu "Double drive modes unimorph deformable mirror for femtosecond laser beam wavefront correction", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928311 (21 August 2014); https://doi.org/10.1117/12.2070595

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